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发明名称
Electrostatic chuck
摘要
申请公布号
EP1378936(B1)
申请公布日期
2011.01.19
申请号
EP20030013693
申请日期
2003.06.17
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
KALKOWSKI, GERHARD, DR. RER. NAT.;RISSE, STEFAN, DIPL.-ING.
分类号
H01L21/68;G03F7/20;H01L21/00;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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