发明名称 Capacitance cell, semiconductor device, and capacitance cell arranging method
摘要 A capacitance cell 21 is wired while using adjacent wiring layers Ma and Mb as a pair of electrode layers T1 and T2 orthogonally to opposed lateral end faces out of lateral end faces X1, X2, Y1, and Y2 that section the cell in a plane direction. Contact surfaces of electrode surfaces T1 and T2 with the lateral end faces are second connection terminals T12 and T22. For longitudinal pathways, first and second via contact layers V1 and V2are connected. The first via contact layer V1 interconnects the wiring layers Ma and Mb. The second via contact layer V2 is connected to a wiring layer located outside beyond an upper or lower end face Z2, Z1. The second via contact layer V2 is connected to a first connection terminal T11, T21 located on the upper or lower end faces Z2, Z1. The capacitance cells 21 are linked via the first and second connection terminals so that a capacitance element having a free shape is formed. A capacitance cell, a semiconductor device, and a capacitance element arranging method that allow to arrange capacitance elements each using wiring layers sandwiching an interlayer insulating film with less of a leak current as electrode layers according to the shapes of unused areas.
申请公布号 US7872293(B2) 申请公布日期 2011.01.18
申请号 US20060482012 申请日期 2006.07.07
申请人 FUJITSU SEMICONDUCTOR LIMITED 发明人 KOMURA KAZUFUMI
分类号 H01L29/94 主分类号 H01L29/94
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