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发明名称
APPARATUS FOR SUPPLYING DEPOSITION GAS
摘要
申请公布号
KR20110000473(U)
申请公布日期
2011.01.17
申请号
KR20090008881U
申请日期
2009.07.09
申请人
发明人
分类号
H01L21/205;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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