发明名称 |
TAPE FOR WAFER PROCESSING |
摘要 |
PROBLEM TO BE SOLVED: To provide a tape for wafer processing capable of reducing occurrence of a label trace, achieving lighter weight, and installing a sensor for detecting a wafer sticking position from the upper side and lateral side of the upper surface of the tape for wafer processing in a wafer sticking machine.SOLUTION: A tape for wafer processing comprises: a long mold releasing film; an adhesive layer having a prescribed planar shape and provided on a first surface of the mold releasing film; an adhesive film covering the adhesive layer, having the prescribed planar shape, and provided so as to come into contact with the mold releasing film around the adhesive layer; and a support member provided at both ends in a short direction of the mold releasing film.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016111165(A) |
申请公布日期 |
2016.06.20 |
申请号 |
JP20140246316 |
申请日期 |
2014.12.04 |
申请人 |
FURUKAWA ELECTRIC CO LTD:THE |
发明人 |
KIMURA KAZUHIRO;SUGIYAMA JIRO;SAKUMA NOBORU;AOYAMA MASAMI;OTA SATOSHI |
分类号 |
H01L21/301;C09J7/02;C09J201/00 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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