PROBE CARD

摘要

PURPOSE: A probe card is provided to universally use a main circuit board regardless of the patterns of a probe module by dividing electric signals and transmitting the electric signals from a lower side circuit board to each probe module. CONSTITUTION: A probe module unit(110) in electrical contact with a semiconductor chip is arranged on a space transformer(120). An interconnector(150) is arranged between a main circuit board(160) and the space transformer. A reinforcing plate(170) is mounted at the rear side of the main circuit board in order to reinforce the main circuit board. A lower side circuit board(130) is arranged at the body(121) of the space transformer. A connector(140) fixes the lower side circuit board to the body of the space transformer.