| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the viscosity characteristic of thin-film-like liquid having thickness of 1 μm or smaller.SOLUTION: This viscosity characteristic measuring device faces a flat surface of a fixed plate to a flat surface of a movable plate in parallel via a liquid film of a predetermined thickness, oscillates the movable plate in parallel with and linearly to the fixed plate while holding the liquid film, and measures the viscosity characteristic of the liquid film based on the oscillating speed and viscous force acting on the movable plate. In this device, a fixed plate fixture for holding the fixed plate in the oscillating direction of the movable plate has a bottom surface orthogonal to the oscillating direction of the movable plate, and the bottom surface can move on with the liquid film so as to hold the liquid film in the surface orthogonal to the oscillating direction of the movable plate. |
