发明名称 |
SYSTEM FOR DETERMINING PARTICLE GENERATION FACTOR, CHARGING METHOD, AND STORAGE MEDIUM |
摘要 |
PROBLEM TO BE SOLVED: To provide a charging method for providing an incentive related to use of a system for determining a particle generation factor of a user.SOLUTION: In this system 10 for determining a particle generation factor including a user interface device 11 through which a user inputs a particle map and a server device 13, the server device 13 calculates accuracy of each of a plurality of particle generation factors based on the particle map; the user interface device 11 displays the calculated accuracy or a title of generation-factor-relevant information 27 related to each particle generation factor corresponding to the accuracy; and the server device 13 provides the generation-factor-relevant information 27 to the user interface device 11, and charges at least a charged fee determined based on the accuracy of the particle generation factor corresponding to the provided generation-factor-relevant information 27 for the provision of the particle generation-factor-relevant information 27. |
申请公布号 |
JP2011009343(A) |
申请公布日期 |
2011.01.13 |
申请号 |
JP20090149697 |
申请日期 |
2009.06.24 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
MORIYA TAKESHI |
分类号 |
H01L21/02;G01N21/956;H01L21/66 |
主分类号 |
H01L21/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|