发明名称 SYSTEM FOR DETERMINING PARTICLE GENERATION FACTOR, CHARGING METHOD, AND STORAGE MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a charging method for providing an incentive related to use of a system for determining a particle generation factor of a user.SOLUTION: In this system 10 for determining a particle generation factor including a user interface device 11 through which a user inputs a particle map and a server device 13, the server device 13 calculates accuracy of each of a plurality of particle generation factors based on the particle map; the user interface device 11 displays the calculated accuracy or a title of generation-factor-relevant information 27 related to each particle generation factor corresponding to the accuracy; and the server device 13 provides the generation-factor-relevant information 27 to the user interface device 11, and charges at least a charged fee determined based on the accuracy of the particle generation factor corresponding to the provided generation-factor-relevant information 27 for the provision of the particle generation-factor-relevant information 27.
申请公布号 JP2011009343(A) 申请公布日期 2011.01.13
申请号 JP20090149697 申请日期 2009.06.24
申请人 TOKYO ELECTRON LTD 发明人 MORIYA TAKESHI
分类号 H01L21/02;G01N21/956;H01L21/66 主分类号 H01L21/02
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