发明名称 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANCAL COMPONENT HAVING A THIN-LAWYER CAP
摘要 A micromechanical component having a substrate, a micromechanical functional layer situated above the substrate, and an encapsulation layer situated above the functional layer, and a method for producing the micromechanical component are provided, the encapsulation layer having at least one trench, and a bridging of the trench by at least one electrically insulating connection link is provided.
申请公布号 US2011006444(A1) 申请公布日期 2011.01.13
申请号 US20080451327 申请日期 2008.05.19
申请人 SCHMITZ VOLKER;GROSSE AXEL 发明人 SCHMITZ VOLKER;GROSSE AXEL
分类号 H01L23/28;H01L21/02 主分类号 H01L23/28
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