A NANO-SCALE MANIPULATOR

摘要

A nano-scale manipulator (10) comprises a mounting deck (11) and a frame (12), the deck (11) being moveably secured to the frame (12) by two flexural joints permitting movement of the deck relative to the frame in first and second respective, mutually orthogonal directions of movement. Manipulator (10) also includes at least one respective, elongate piezoelectric actuator (21, 22) for each of the flexural joints, each respective piezoelectric actuator (21, 22) being secured so as to interconnect the deck (11) and the frame (12) and being extensible and contractible in a direction that is parallel to one of the said directions of movement; and a source (23) of electrical power for causing operation of each piezoelectric actuator (21, 22). Each of the piezoelectric actuators (21, 22) also is free to flex in directions other than its direction of extension and contraction.