发明名称 SEMICONDUCTOR DEVICE HAVING ASYMMETRIC BULB-TYPE RECESS GATE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device includes a silicon substrate; a device isolation structure formed in the silicon substrate to delimit an active region which has a pair of gate forming areas, a drain forming area between the gate forming areas, and source forming areas outside the gate forming areas; an asymmetric bulb-type recess gate formed in each gate forming area of the active region and having the shape of a bulb on the lower end portion of the sidewall thereof facing the source forming area; and source and drain areas respectively formed on the surface of the substrate on both sides of the asymmetric bulb-type recess gate.
申请公布号 US2011008942(A1) 申请公布日期 2011.01.13
申请号 US20100887694 申请日期 2010.09.22
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM KYUNG DO
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
主权项
地址