| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer holder capable of suppressing warpage thereof, a film formation device, and a film formation method.SOLUTION: A wafer holder according to the present invention is a wafer holder on which a wafer is mounted, and includes a front face recessed part formed on the front face of the wafer holder and accommodating the wafer, and a rear face recessed part formed on the rear face of the wafer holder and accommodating the wafer. |
