| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an electromechanical conversion element capable of performing selective patterning in a simplified process, the electromechanical conversion element manufactured by the method, and a droplet discharging head and a droplet discharging device.SOLUTION: A method of manufacturing an electromechanical conversion element has: a first process in which surface modification on a substrate being a first electrode is partially performed; a second process in which a sol gel liquid which is a metal composite oxide is applied tp the predetermined portion of the first electrode subjected to surface modification; a third process in which the applied sol gel liquid is dried, subjected to thermal decomposition, and crystallized, and an electromechanical conversion film is formed; a fourth process in which the first, second, and third processes are repeated in order and a desired film thickness is obtained; and a fifth process in which a second electrode is disposed so as to interpose the substrate of the first electrode and the electromechanical conversion film. |
