| 摘要 |
PROBLEM TO BE SOLVED: To convert a charged particle beam into a soft X-ray in a wavelength range of 0.6-6 nm including a "water window" domain with high efficiency, and to suppress a damage to a sample by suppressing low a diffusion range in the sample of the charged particle beam.SOLUTION: The sample support member (11) is provided with a metal film (11b), which emits characteristic X-rays in the wavelength range of 0.6-6.0 nm by electron beam irradiation, on one main surface of a sample support film (11a) which is a silicon nitride film or a carbon film. Hereby, the characteristic X-rays in the soft X-ray region are emitted with high efficiency (high intensity) from the metal film (11b) with which the electron beam has struck. Since the high-intensity characteristic X-rays strike the sample (10), the SN ratio of the observation image is improved. Since the metal film (11b) has the effect of minimizing the range where electrons are diffused in the sample support film (11a), the acceleration voltage of the incident electron beam can be increased, and the metal film (11b) has an effect of not only improving the SN ratio but also improving the resolution. |
