METHOD AND DEVICE FOR INSPECTION OF SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a method for inspection of a sample including the first layer equipped with known reflectance property, and the second layer formed on the above first layer.SOLUTION: The method includes a step to direct radiation towards the sample surface, and a step to detect the radiation reflected on the surface for generating reflectance signal as a function of elevation angle to the surface. A feature arisen due to reflection of the radiation from the first layer is identified by the first layer. The reflectance signal is calibrated depending on both the identified feature and the known reflectance property of the first layer. Such a calibrated reflectance signal is analyzed for determining a characteristic of the second layer. Other enhanced inspection methods are also disclosed.