| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing an electron source electrode superior in emission characteristics without loss of CNT.SOLUTION: In the method for manufacturing the electron source electrode, a dispersion liquid in which the carbon nanotube (CNT) is dispersed in a dispersion medium is filtered by a membrane filter, the CNT accumulated on the membrane filter is transcribed onto a substrate, the CNT is fixed to the substrate by irradiating an electron beam in a vacuum environment, and next, the CNT is napping-brushed. |
