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发明名称
METHOD AND DEVICE FOR ION BEAM PROCESSING OF SURFACES
摘要
申请公布号
EP1680800(A2)
申请公布日期
2006.07.19
申请号
EP20040802669
申请日期
2004.10.29
申请人
ROTH & RAU AG
发明人
MAI, JOACHIM;ROTH, DIETMAR;RAU, BERND;DITTRICH, KARL-HEINZ
分类号
H01J37/20;H01J37/305;H01J37/317;(IPC1-7):H01J37/305
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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