| 摘要 |
<p>Provided is an elastic wave device that comprises a piezoelectric film supported by a supporter, wherein a configuration is achieved that prevents various malfunctions from occurring upon joining, and that does not let degradation occur, structurally. The elastic wave device is provided with a piezoelectric film (10) that is formed by peeling-off a piezoelectric single-crystal substrate (1), an inorganic layer (20) formed on the back surface (13) of the piezoelectric film (10), an elastic-body layer (30) disposed on the inorganic layer (20) at the surface opposite to the piezoelectric film (10), and the supporter (40) that is laminated onto the elastic-body layer (30) at the surface opposite to the inorganic layer (20). The elastic-body layer (30) has a function to relieve the stress caused by laminating the supporter (40) and the piezoelectric film (10) provided with the inorganic layer (20) together, and has a prescribed modulus of elasticity. Meanwhile, the inorganic layer (20) consists of a material having a bigger modulus of elasticity than the elastic-body layer (30), and minimizes damping due to the installation of the elastic-body layer (30).</p> |
