| 摘要 |
<p>This invention provides a method for manufacturing an inexpensive nozzle plate for a liquid ejection head, which can uniformly eject a liquid well through ejection holes. This method comprises the steps, in the following order, of providing a substrate comprising a first base material of Si and a second base material, of which the etching rate in Si anisotropic dry etching is lower then that of Si, provided on one side of the first base material, forming a film as a second etching mask on the surface of the second base material, forming a second etching mask pattern having a small-diameter opening shape in the second etching mask film, subjecting the assembly to etching until the etching part is extended through the second base material, forming a film as a first etching mask film on the surface of the first base material, forming a first etching mask pattern having a large-diameter opening shape in the first etching mask film, and subjecting the assembly to Si anisotropic dry etching until the etched part is extended through the first base material.</p> |
