,申请号JP20040057539-传众专利搜索

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发明名称
摘要
申请公布号	JP4608912(B2)	申请公布日期	2011.01.12
申请号	JP20040057539	申请日期	2004.03.02
申请人		发明人
分类号	G01D5/245;H01L43/02;H01L43/08	主分类号	G01D5/245
代理机构		代理人
主权项
地址

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