发明名称 Method for manufacturing photoelectric converting device
摘要 The present invention relates to a manufacturing method of obtaining a photoelectric converting device which can sufficiently maintain airtightness of a housing space for photocathode without degradation of the characteristics of the photocathode. In accordance with the manufacturing method, on the side wall end face of a lower frame and a bonding portion of an upper frame forming an envelope of the photoelectric converting device, a multilayered metal film of chromium and nickel is formed. In a vacuum space decompressed to a predetermined degree of vacuum and having a temperature not more than the melting point of indium, these upper and lower frames introduced therein are brought into close contact with each other with a predetermined pressure while sandwiching indium wire members, and accordingly, an envelope having a housing space whose airtightness is sufficiently maintained is obtained.
申请公布号 US7867807(B2) 申请公布日期 2011.01.11
申请号 US20070161890 申请日期 2007.02.28
申请人 HAMAMATSU PHOTONICS K.K. 发明人 KISHITA HITOSHI;SUGIYAMA HIROYUKI;KYUSHIMA HIROYUKI;SHIMOI HIDEKI;INOUE KEISUKE
分类号 H01L21/00 主分类号 H01L21/00
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