发明名称 METHOD FOR FORMING CONTACTS IN A SEMICONDUCTOR DEVICE
摘要 PURPOSE: A semiconductor device contact forming method is provided to decrease contact defects by applying a unit contact having a large size relative to a wide area. CONSTITUTION: First conductive patterns located in different layers are overlapped as a normal area that is smaller than a certain area. A first contact is formed between the first conductive patterns with a first unit contact(34) having the first area as the normal area. The second conductive patterns located on the same layer with the first conductive patterns are overlapped in a wide area that is larger than the certain area.
申请公布号 KR20110002987(A) 申请公布日期 2011.01.11
申请号 KR20090060554 申请日期 2009.07.03
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, SUNG HO
分类号 H01L21/28 主分类号 H01L21/28
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