LASER ANNEALING APPARATUS HAVING OXYGEN PARTIAL DEGASSING MODULE

摘要

PURPOSE: A laser heat processing apparatus having deoxidation module is provided to implement the reliable heat treatment process by spraying the inert gas to a substrate with uniform amount and pressure where the laser beam is irradiated on. CONSTITUTION: A laser radiation unit is installed on the outside of a reaction chamber to be positioned on the top of a quartz window(20) and irradiates the laser beam on the substrate. The inert gas chamber(80) is installed between the quartz window and the substrate. A discharging slit(71) is formed on the side of the inert gas chamber and a beam radiation slit(81) is formed on the bottom to pass the irradiated laser beam.