| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump in a fluid channel shape, obtaining efficient flow velocities.SOLUTION: The micropump has a pressurizing chamber 3, a suction fluid channel 4, and a delivery fluid channel 5 formed in a silicon substrate 2 whose crystallographic orientation is <100>, the channels 4 and 5 being in communication with the chamber 3. In this micropump, at least parts of the inner walls of the pressurizing chamber 3, suction fluid channel 4, and delivery fluid channel 5 are <111> plane. The pressurizing chamber 3 differs in width and depth from the suction fluid channel 4 and delivery fluid channel 5. |
