发明名称 SAW SENSOR DEVICE AND FLUID CONTROL METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an SAW sensor device capable of minimizing noise generation and improving the reliability of analysis, and to provide a fluid control method that uses the device.SOLUTION: The technique related to the SAW sensor device enables minimization of noise generation by the contamination of a fluid control section, when a fluid is controlled by forming the fluid control section to control the flow of a fluid on the outside of the body including the SAW sensor, and repeating use of the fluid control section, and thereby provides cost benefit and practical use.
申请公布号 JP2011002442(A) 申请公布日期 2011.01.06
申请号 JP20090230605 申请日期 2009.10.02
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 LEE HUN-JOO;LEE SOO SUK;CHO EUN CHOL
分类号 G01N35/08;G01N1/00;G01N37/00 主分类号 G01N35/08
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