发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for manufacturing a semiconductor device is provided to improve the capacitance of a capacitor by increasing the area of an effective storage node. CONSTITUTION: A first sacrificial layer is formed on a substrate with a first storage node contact(SNC1). A second storage node contact connected the first storage node contact is formed by passing through the first sacrificial layer. A second sacrificial layer is formed on the first sacrificial layer including the second storage node contact. A storage node hole(21) is formed on the second sacrificial layer to expose the second storage node contact. A storage node is formed on the storage node hole. The first and second sacrificial layers are removed.
申请公布号 KR20110001339(A) 申请公布日期 2011.01.06
申请号 KR20090058834 申请日期 2009.06.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, DAE SIK
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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