发明名称 METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE SHEET
摘要 A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.
申请公布号 US2011003024(A1) 申请公布日期 2011.01.06
申请号 US20100877753 申请日期 2010.09.08
申请人 VERIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 KELLERMAN PETER L.;SINCLAIR FRANK;CARLSON FREDERICK
分类号 B29D7/01 主分类号 B29D7/01
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