| 摘要 |
The present invention relates to a flat plate precision floating system for precisely floating a flat plate with a fluid (gas or liquid), and particularly, to a flat plate precision floating system employing angled fluid jets and comprising: a first flat plate floating unit and a second flat plate floating unit sequentially and repetitively made of a flat plate floating portion including a nozzle block having a planar portion formed parallel and flat to the conveying direction of the flat plate, and a pair of opposite angled portions with upper left and right edges that are angled with respect to the flat plate, a pair of nozzle plates formed to enclose the angled portions and outer peripheries of the nozzle block at positions having the same height as or being slightly lower than the pair of opposite angled portions of the nozzle block, and a pair of opposite angled nozzle portions formed by the pair of opposite angled portions of the nozzle block and the nozzle plates, the flat plate floating portion inducing angled fluid jets (gas or liquid) discharged through the opposed pair of angled nozzle portions to flow at an upward angle toward the bottom of the flat plate, and suspending the flat plate at a certain gap with pressure (suspending force) formed at the upper portion of the nozzle block planar portion at which the angled fluid jets (gas or liquid) discharged in opposition converge; and a flat plate suction unit applying suctioning force to the flat plate through low pressure generated by angled fluid jets (gas or liquid) discharged through a pair of opposite angled nozzle portions formed between the first flat plate floating unit and the second flat plate floating unit, wherein the flat plate is securely suspended and fixed by means of simultaneously applying the suspending force from the first flat plate floating unit and the second flat plate floating unit and the suctioning force from the flat plate suction unit. |
