Arrangement for coating the substrates, comprises coating source and substrate support in vacuum chamber, where coating source is arranged to the support on one-side and the support has rear side pointing towards the coating source

摘要

The arrangement comprises a coating source and a substrate support in a vacuum chamber, where the coating source is arranged to the substrate support on one-side. The substrate support has a rear side pointing towards the coating source and turned away from the coating source. The substrate support in the vacuum chamber defines a coating chamber on the coating source side and a rear side chamber at the rear side of the substrate support. A particle trap unbinding the particles provided for coating is arranged into the rear side chamber. The particle trap consists of a collecting element. The arrangement comprises a coating source and a substrate support in a vacuum chamber, where the coating source is arranged to the substrate support on one-side. The substrate support has a rear side pointing towards the coating source and turned away from the coating source. The substrate support in the vacuum chamber defines a coating chamber on the coating source side and a rear side chamber at the rear side of the substrate support. A particle trap unbinding the particles provided for coating is arranged into the rear side chamber. The particle trap consists of a collecting element arranged in a distance to the substrate support, where deflection elements are arranged at a side of the collecting element pointing to the coating source and are spaced to each other. The surfaces of the deflection elements predominantly have a vertical surface, which includes an angle of 90-45[deg] towards the direction to the coating source. The deflection elements are formed as blades, which are arranged parallel to each other. The blades are formed in the cross-section in a wedge-shaped manner and/or in a rectangular manner and are provided with a tip pointing to the coating source. The deflection elements are formed in a pin-like manner and are arranged in a brush-like manner. The deflection elements are cooled. The collecting element at the side pointing to the coating source has a flat surface lying towards vertical to the direction to the coating source, where the deflection elements are arranged at the flat surface. The distance is equal to a distance between the coating source and the substrate support.