发明名称 Position detection method, exposure apparatus, and device manufacturing method
摘要 This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In this method, the relationship between the position of the target object in the optical-axis direction of the optical system and the evaluation value of the signal output from the image sensor is measured, and the position of a peak close to a reference focus position, which is selected if the evaluation value has a plurality of peaks in the measured relationship, is detected as the focus position.
申请公布号 US7864308(B2) 申请公布日期 2011.01.04
申请号 US20090368790 申请日期 2009.02.10
申请人 CANON KABUSHIKI KAISHA 发明人 SATO HIROSHI
分类号 G01J1/00 主分类号 G01J1/00
代理机构 代理人
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