| 摘要 |
PURPOSE: A device for holding a large substrate is provided to enable a substrate to be stably mounted to exact location by a support having an upper part, which is formed by curved according to the curvature of bening large substrate. CONSTITUTION: Location of a substrate, which entered into a chamber, is assigned by location assigning unit(220) of a pin shape installed to be located in the edge of a substrate in diagonal direction. A center support is installed on the center part of a support plate(100) as a pin shape. If the substrate is supported on a support, the support place the substrate on the support place by descending below based on the support plate. A side support comprised into one bar. |
