PELLICLE FRAME AND LITHOGRAPHIC PELLICLE

摘要

PURPOSE: A pellicle frame and a lithographic pellicle are provided to offer the pellicle frame and the lithographic pellicle capable of reducing the deformation of photomask due to the deformation of pellicle deformation. CONSTITUTION: The concave part(12) is formed on each side. The cross area of the pellicle frame bar of 1 mm^2 to 6 mm^2. The planarity of the pellicle frame is 0μm to 20μm. The area of the quadrangle is 4 mm^2 to 20 mm^2.