发明名称 METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
摘要 A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
申请公布号 US2010327927(A1) 申请公布日期 2010.12.30
申请号 US20090491538 申请日期 2009.06.25
申请人 MKS INSTRUMENTS, INC. 发明人 NAGARKATTI SIDDHARTH;TIAN FENG;LAM DAVID;RASHID ABDUL;BENZERROUK SOUHEIL;BYSTRYAK ILYA;MENZER DAVID;SCHUSS JACK J.;AMBROSINA JESSE E.
分类号 H03K3/84 主分类号 H03K3/84
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