SPLT FIELD INSPECTION SYSTEM USING SMALL CATADIOPTRIC OBJECTIVE,申请号IL20100207856-传众专利搜索

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发明名称	SPLT FIELD INSPECTION SYSTEM USING SMALL CATADIOPTRIC OBJECTIVE
摘要
申请公布号	IL207856(D0)	申请公布日期	2010.12.30
申请号	IL20100207856	申请日期	2010.08.29
申请人	KLA-TENCOR CORPORATION	发明人
分类号	G02B	主分类号	G02B
代理机构		代理人
主权项
地址

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