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发明名称
SILICON CARBIDE POLISHING METHODS UTILIZING WATER-SOLUBLE OXIDIZERS
摘要
申请公布号
IL207886(D0)
申请公布日期
2010.12.30
申请号
IL20100207886
申请日期
2010.08.31
申请人
CABOT MICROELECTRONICS CORPORATION
发明人
分类号
H01L
主分类号
H01L
代理机构
代理人
主权项
地址
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