发明名称 SEMICONDUCTOR DEVICE INCLUDING THROUGH-ELECTRODE AND METHOD OF MANUFACTURING THE SAME
摘要 According to one embodiment, a semiconductor device includes the following structure. The first insulating film is formed on a first major surface of a semiconductor substrate. The electrode pad is formed in the first insulating film. The electrode pad includes a conductive film. At least a part of the conductive film includes a free region in which the conductive film is not present. The external connection terminal is formed on a second major surface facing the first major surface. The through-electrode is formed in a through-hole formed from the second major surface side of the semiconductor substrate and reaching the electrode pad. The first insulating film is present in the free region, and a step, on a through-electrode side, between the first insulating film being present in the free region and the electrode pad is not greater than a thickness of the electrode pad.
申请公布号 US2010327383(A1) 申请公布日期 2010.12.30
申请号 US20100822735 申请日期 2010.06.24
申请人 发明人 HAYASAKI YUKO;HAGIWARA KENICHIRO
分类号 H01L31/0232;H01L21/768;H01L31/0224 主分类号 H01L31/0232
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