发明名称 ACOUSTIC RESONATOR STRUCTURE HAVING AN ELECTRODE WITH A CANTILEVERED PORTION
摘要 An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.
申请公布号 US2010327994(A1) 申请公布日期 2010.12.30
申请号 US20090626035 申请日期 2009.11.25
申请人 CHOY JOHN;FENG CHRIS;NIKKEL PHIL 发明人 CHOY JOHN;FENG CHRIS;NIKKEL PHIL
分类号 H03H9/54;H01L41/047;H01L41/08 主分类号 H03H9/54
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