发明名称 |
LOW VAPOR PRESSURE HIGH PURITY GAS DELIVERY SYSTEM |
摘要 |
Systems, apparatuses and methods for vapor phase fluid delivery to a desired end use are provided, wherein the conditions of the system are monitored to determine when the water concentration or supply vessel surface temperature exceeds a specified value or when the low vapor pressure fluid pressure falls below a specified value for the purpose of removing a first supply vessel from service by discontinuing vapor flow from the first supply vessel and initiating vapor flow from a second supply vessel.
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申请公布号 |
US2010326537(A1) |
申请公布日期 |
2010.12.30 |
申请号 |
US20100877318 |
申请日期 |
2010.09.08 |
申请人 |
SARIGIANNIDIS CHRISTOS;BERGMAN JR THOMAS JOHN;JOHNSON MICHAEL CLINTON;CHAKRAVARTI SHRIKAR |
发明人 |
SARIGIANNIDIS CHRISTOS;BERGMAN, JR. THOMAS JOHN;JOHNSON MICHAEL CLINTON;CHAKRAVARTI SHRIKAR |
分类号 |
F15D1/00 |
主分类号 |
F15D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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