Fabrication Of Ferroelectric Ceramic Films Using Rapid Thermal Processing With Ultra-Violet Rays

摘要

A method for fabricating a ferroelectric ceramic film. The method includes coating a gel film on a substrate. The gel film has at least one ferroelectric material and at least one ultra-violet (UV) sensitive material. The method further includes simultaneously heating the gel film and irradiating a UV ray onto the gel film transforming the gel film into an amorphous ferroelectric film made of the at least one ferroelectric material. The above heating may be performed by using a rapid thermal processing technique.