DEVICE FOR POSITIONING A MOVEABLE OBJECT OF SUBMICRON SCALE

摘要

The instant disclosure describes a device for positioning a moveable object which can be moved over a distance of the order of 1 nanometer in a time of 1 microsecond or less, comprising: a microtip; first piezoelectric positioning, polarization, detection and control means for moving the microtip relative to the object and bringing it to a distance of the order of 1 nanometer from the object in order to make a tunnel current flow between the microtip and the object, for measuring the tunnel current and for slaving, depending on the measured tunnel current, the distance between the microtip and the object to a constant value (dref); and second positioning and control means which are capacitively coupled to the object so as to oppose an attractive force between the object and the microtip depending on the measured tunnel current, the second means being tied to a reference plane.