VIBRATORY GYROSCOPE USING PIEZOELECTRIC FILM

摘要

A vibrating gyroscope according to this invention includes a ring-shaped vibrating body 11 having a uniform plane, a leg portion 15 flexibly supporting the ring-shaped vibrating body and having a fixed end, a fixed potential electrode 16, and a plurality of electrodes 13a, 13b, ..., 13h formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in a thickness direction thereof. In this case, in a representative example shown in Fig. 1 , when one of driving electrodes 13a for exciting a primary vibration of the ring-shaped vibrating body 11 in a vibration mode of cosN¸ is set as a reference driving electrode, the plurality of remaining electrodes 13b, ..., 13h are disposed at specific positions. Such disposition allows this vibrating gyroscope to detect a uniaxial to triaxial angular velocity by adopting a secondary vibration detector inclusive of an out-of-plane vibration mode.