发明名称 |
Method for treating the surface of object and apparatus thereof |
摘要 |
An apparatus for treating the surface of an object to be treated comprising introducing a surface treatment fluid into a reaction vessel (4) capable of receiving an object, introducing the surface treatment fluid into a separation vessel (14) after the object is subjected to surface treatment, and circulating the surface treatment fluid, from which a contaminant has already been removed, to the reaction vessel (4). At the time of treatment on the surface of the object, a circulation passage for the surface treatment fluid including the reaction vessel (4) is communicated and the surface treatment fluid is constantly circulated through the circulation passage.
|
申请公布号 |
US7857952(B2) |
申请公布日期 |
2010.12.28 |
申请号 |
US20070981136 |
申请日期 |
2007.10.31 |
申请人 |
ASAHI ENGINEERING CO., LTD. |
发明人 |
YOSHIDA HIDEO;MIYATA SEIZO;SONE MASATO;SATO NOBUYOSHI |
分类号 |
C25D17/06;B08B3/14;C23C18/16;C25D5/00;C25D5/08;C25D17/00;C25D21/00;H01L21/288;H01L21/306;H01L21/3213 |
主分类号 |
C25D17/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|