发明名称 YIELD PREDICTION FEEDBACK FOR CONTROLLING AN EQUIPMENT ENGINEERING SYSTEM
摘要 A yield prediction is received by a scheduling and dispatch controller, wherein the yield prediction is associated with a manufacturing tool and a product. A weighting of the manufacturing tool is adjusted in a routing algorithm based on the yield prediction. A cost-benefit analysis is computed that identifies a cost and a benefit of manufacturing future products on the manufacturing tool. A determination is made regarding whether to process a future product on the manufacturing tool based on the cost-benefit analysis.
申请公布号 KR20100135784(A) 申请公布日期 2010.12.27
申请号 KR20107022370 申请日期 2009.02.06
申请人 APPLIED MATERIALS, INC. 发明人 MOYNE JAMES;WARD NICHOLAS;STAFFORD RICHARD
分类号 G06F19/00 主分类号 G06F19/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利