发明名称 DISCHARGE APPARATUS
摘要 PURPOSE: A discharge device is provided to fit impact location to the location of an outlet therein since a substrate passes through the lower part of a head holding unit which holds multiple heads. CONSTITUTION: A discharge device(10) comprises a pedestal(70), a head holding unit(30), a head(32), an outlet(35), a substrate transferring unit(20), and a substrate(50). The pedestal is stopped on a horizontal reference surface. The head holding unit is fixed to the pedestal. The head is positioned in the head holding unit. The multiple outlets are formed on the head. The substrate transferring unit moves along the first direction which is parallel to the reference surface.
申请公布号 KR20100135663(A) 申请公布日期 2010.12.27
申请号 KR20100056559 申请日期 2010.06.15
申请人 ULVAC, INC. 发明人 INOUE YUUYA;NAMEKAWA TAKUMI;BABA KEI;HANE KOUJI;MAEKAWARA HIROMI
分类号 B41J2/01;G02B5/20 主分类号 B41J2/01
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