| 摘要 |
PROBLEM TO BE SOLVED: To eliminate spark discharge and to prevent air bubbles from entering when electrostatically attracting a resin film with a metal deposition film for a diaphragm to a metallic base. SOLUTION: When electrostatically attracting a mother resin film 10 provided with the metal deposition film to be the diaphragm to the metallic base 20 with a flat surface, bonding a ring jig 30 on the resin film 10 through a prescribed adhesive and then taking out the ring jig with the diaphragm by cutting the resin film 10 along the outer diameter of the ring jig 30, conductive pile 21 is electrostatically frocked on the surface of the base 20 through a conductive adhesive, and the resin film 10 is electrostatically attracted on the pile 21. COPYRIGHT: (C)2011,JPO&INPIT
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