| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate processing system easily transferring a received telegram message to a predetermined transfer destination without discard of the telegram message by a group management device even when a telegram message classification code in the telegram message received from a substrate processing device or a terminal device is not defined in a data format list memorized in the group management device. <P>SOLUTION: The group management device includes: a communication unit for transmitting/receiving a telegram message to/from a substrate processing device or a terminal device; a list memory unit for memorizing a data format list; and a telegram message processing unit for checking based on the data format list whether a telegram message classification code extracted from a received telegram message is defined or not, and then extracting data from a data part of the received telegram message when the classification code is defined, while, when the classification code is not defined, generating a transfer telegram message containing the telegram message classification code extracted from the received telegram message and the data part read from a telegram message memory unit so that the transfer telegram message is transferred by the communication unit. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
