发明名称 |
METHOD OF CLEANING SLIT NOZZLE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of cleaning slit nozzle which can wash away a coating liquid remaining within a supply tube and a slit nozzle with a small amount of a solvent used and without disassembling the slit nozzle, allow rapid drying after cleaning and enable resuming quickly the coating process using the slit nozzle. SOLUTION: The method is for cleaning the slit nozzle 1 which discharges the coating liquid supplied by the supply pipe (2) from a slit formed between lips 1a and 1b arranged oppositely with a slight clearance and allows discharging and removing the coating liquid remaining within the slit nozzle 1 efficiently by introducing liquefied carbon dioxide into the supply pipe (2) after completion of discharge of the coating liquid and discharging the liquefied carbon dioxide from the slit. COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2010284595(A) |
申请公布日期 |
2010.12.24 |
申请号 |
JP20090140413 |
申请日期 |
2009.06.11 |
申请人 |
AIR WATER INC |
发明人 |
INAGAKI TORU;YOSHIOKA HARUO |
分类号 |
B05D3/10;B05C5/02;B05C11/10;B05D1/26;B08B9/00 |
主分类号 |
B05D3/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|