| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic surface shape measuring device and a dynamic surface shape measuring method capable of measuring a dynamic surface deformation of a movable object without using reference light during measurement. SOLUTION: This dynamic surface shape measuring device 1 mainly includes a pulsing light source 2 for emitting pulsing light with which the movable object 7 is irradiated, and a wavefront sensor 14 for measuring wavefront aberration, and detects movement of the movable object 7 by an approximately parallel light source 16, a first light receiving element 19 and a second light receiving element 20 during measurement. A signal generator allows the pulsing light source 2 to emit light at a timing when the movable object 7 performs a prescribed movement, corresponding to the detected movement. The emitted pulsing light is reflected by a surface to be measured of the movable object 7, and reflected light enters the wavefront sensor 14. The wavefront aberration of the reflected light is measured by the wavefront sensor 14, and a dynamic surface shape of the surface to be measured is measured from the wavefront aberration of a difference with a reference wavefront. COPYRIGHT: (C)2011,JPO&INPIT
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