| 摘要 |
PROBLEM TO BE SOLVED: To form an organic electroluminescent element of a high throughput and high performance by shortening tact time of a transferring process as a whole. SOLUTION: A donor substrate 3 with an organic donor layer 13 formed at a deposition rate of 1 nm/sec or more by vacuum deposition, and a film-formed substrate 5 with a first electrode 17 formed are prepared. With the donor substrate 3 and the film-formed substrate 5 while being superposed on each other, radiant rays are irradiated from a donor substrate 3 side and an organic donor layer 13 is transferred in sublimation on the first electrode 17 of the film-formed substrate 5 to form an organic layer 25, and afterwards, a second electrode 29 is formed on the organic layer 25 to obtain the organic electroluminescent element 1. COPYRIGHT: (C)2011,JPO&INPIT
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