| 摘要 |
<p>Disclosed is an easily-producible resonator which uses torsional vibration and has a structure wherein the substrate surface and vibration member lower surface face each other with a sufficiently narrow gap in between. The resonator is provided with a base material (1) which has a flat main surface (1u), layered anchor parts (2a,2b) which are fixed to the main surface (1u), a layered vibrating imparting part (3) which is conductive, a beam-like layered vibration member (4) which is joined to the upper surface of the anchor parts (2a, 2b) with an insulating film (5) disposed therebetween and expands two-dimensionally, and a lead-out conductor (6) which is electrically connected to the vibrating imparting part (3) and extends to the outer side of the region that is covered by the vibration member when seen from above. The upper surface (3u) of the vibrating imparting part (3) faces a portion of the lower surface (4w) of the vibration member (4) with a gap (11), in between, having a distance that is approximately equal to the thickness of the insulating film (5), so that torsional vibration can be generated at at least a portion of the vibration member (4) by the generation of a potential difference between the upper surface (3u) vibrating imparting part (3) and the lower surface (4w) of the vibration member (4).</p> |
