Apparatus for transporting plate-shaped substrate into the elongated vacuum treatment systems, comprises transport rollers lying transverse to the longitudinal extension of the vacuum treatment system, and supporting rollers

摘要

The apparatus for transporting plate-shaped substrate (1) into the elongated vacuum treatment systems, comprises transport rollers (2) lying transverse to the longitudinal extension of the vacuum treatment system, where the substrate is transportable in a substrate transport plane (4) with the transport rollers by the apparatus through two adjacent system chambers (6) that are separatable from each other by a locking unit of a vacuum valve that is movable in a moving space between a closing position and an opening position, and supporting rollers rotatably mounted in a rotational axis. The apparatus for transporting plate-shaped substrate (1) into the elongated vacuum treatment systems, comprises transport rollers (2) lying transverse to the longitudinal extension of the vacuum treatment system, where the substrate is transportable in a substrate transport plane (4) with the transport rollers by the apparatus through two adjacent system chambers (6) that are separatable from each other by a locking unit of a vacuum valve that is movable in a moving space between a closing position and an opening position, and supporting rollers rotatably mounted in a rotational axis transverse to the longitudinal extension, where the supporting roller lies with the opened valve in the moving space of the locking unit and is removable from the moving space during closing the valve and the upper side of the supporting roller lies in the substrate transport plane with the opened locking unit. The locking unit has a holder, in which the supporting roller is rotatably mounted, and is formed as a valve slider of a vacuum slide valve. The locking unit is formed as valve blade of a vacuum flap valve. The holder is movable, so that the supporting roller is upwardly movable in closed position of the valve blade below the substrate transport plane and during opening the locking unit, so that it is positioned at the substrate transport plane tangentially with the opened locking unit. The holder is rigidly and movably connected with the locking unit, and is drivable, where the drive of the holder is connected with a drive of the locking unit and is provided with an own drive. The holder consists of two couples, which are pivotably connected with the valve blade and are provided with rotary bearing, in which the supporting roller is mounted at both ends. The supporting rollers are arranged in same type and manner, and are formed as driven rollers. The supporting roller is drivably connected with an own drive system with the last transport roller lying before the supporting roller in a transport direction (5). The supporting roller is formed as loose roller and as cooled or heated roller, has a diameter that is less than the diameter of the transport rollers, and consists of ceramic, metal, composite material or plastic.